Future of microelectromechanical systems (MEMS)

This publication has 7 references indexed in Scilit:

• A capacitive accelerometer using SDB-SOI structure
  Sensors and Actuators A: Physical, 1996
• Silicon fusion bonding and deep reactive ion etching: a new technology for microstructures
  Sensors and Actuators A: Physical, 1996
• Silicon Microactuators for Computer Disk Drives
  Japanese Journal of Applied Physics, 1996
• Airbag application: a microsystem including a silicon capacitive accelerometer, CMOS switched capacitor electronics and true self-test capability
  Sensors and Actuators A: Physical, 1995
• A surface micromachined silicon accelerometer with on-chip detection circuitry
  Sensors and Actuators A: Physical, 1994
• Integrated movable micromechanical structures for sensors and actuators
  IEEE Transactions on Electron Devices, 1988
• A gas chromatographic air analyzer fabricated on a silicon wafer
  IEEE Transactions on Electron Devices, 1979