Plasma Etching of Refractory Gates of Metals, Silicides and Nitrides
- 1 January 1984
- book chapter
- Published by Elsevier
- Vol. 4, 39-77
- https://doi.org/10.1016/b978-0-444-86905-0.50008-8
Abstract
No abstract availableThis publication has 50 references indexed in Scilit:
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