In situ X-ray investigations of thin film growth
- 1 July 1998
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 324 (1-2) , 63-67
- https://doi.org/10.1016/s0040-6090(97)01207-8
Abstract
No abstract availableThis publication has 7 references indexed in Scilit:
- X-ray reflectivity analysis of thin TiN and TiOxNy films deposited by dual-ion-beam sputtering on (100)Si substratesThin Solid Films, 1997
- Investigation of superthin carbon layers and multilayer carbon structures by x-ray reflectivity measurementsPublished by SPIE-Intl Soc Optical Eng ,1996
- Numerical ellipsometry: Applications of a new algorithm for real-time, in situ film growth monitoringJournal of Vacuum Science & Technology A, 1996
- X‐ray Monitoring System for in situ Investigation of Thin Film GrowthCrystal Research and Technology, 1995
- Soft X-Ray OpticsPublished by SPIE-Intl Soc Optical Eng ,1994
- Oxidation of epitaxial Fe films monitored by x-ray reflectivityJournal of Materials Research, 1994
- Mole fractions of H, CH3, and other species during filament-assisted diamond growthApplied Physics Letters, 1991