Tungsten nitride films grown via pulsed laser deposition studied in situ by electron spectroscopies
- 1 May 2003
- journal article
- Published by Elsevier in Applied Surface Science
- Vol. 214 (1-4) , 58-67
- https://doi.org/10.1016/s0169-4332(03)00343-x
Abstract
No abstract availableKeywords
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