Structural studies of amorphous and crystallized tungsten nitride thin films by EFED, XRD and TEM
- 6 September 2000
- journal article
- Published by Elsevier in Applied Surface Science
- Vol. 167 (1-2) , 59-68
- https://doi.org/10.1016/s0169-4332(00)00508-0
Abstract
No abstract availableKeywords
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