High density, low parasitic direct integration by fluidic self assembly (FSA)
- 11 November 2002
- proceedings article
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
No abstract availableKeywords
This publication has 9 references indexed in Scilit:
- Surface micromachined, digitally force-balanced accelerometer with integrated CMOS detection circuitryPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2003
- Electronics for micromachined inertial sensorsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Fluidic self-assembly of silicon microstructuresPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Design and Self-Assembly of Open, Regular, 3D MesostructuresScience, 1999
- Crystallization of Millimeter-Scale Objects with Use of Capillary ForcesJournal of the American Chemical Society, 1998
- Three-dimensional self-assembly of millimetre-scale componentsNature, 1997
- Integration of fluidically self-assembled optoelectronic devices using a silicon-based processIEEE Photonics Technology Letters, 1995
- Fluidic self-assembly of InGaAs vertical cavitysurface emitting lasers onto siliconElectronics Letters, 1995
- Fluidic self-assembly for the integration of GaAs light-emitting diodes on Si substratesIEEE Photonics Technology Letters, 1994