A SIMS study on positive and negative ions sputtered from graphite by mass-separated low energy Ne+, N2+ and N+ ions

This publication has 40 references indexed in Scilit:

• X-ray photoelectron spectroscopy studies of modified surfaces of α-Al2O3, SiO2, and Si3N4 by low energy reactive ion beam irradiation
  Journal of Vacuum Science & Technology A, 1999
• Kinetic energy influence of hyperthermal dual ion beams on bonding and optical properties of carbon nitride films
  Applied Physics Letters, 1998
• Carbon nitride thin films formed by low energy ion beam deposition with positive and negative ions
  Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1997
• Synthesis of carbon-nitride films using a fast-switched dual-source low energy ion beam deposition system
  Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1994
• Silicon nitride formation by low energy N+ and N+ 2 ion beams
  The Journal of Chemical Physics, 1992
• Structural properties and electronic structure of low-compressibility materials: β-${\mathrm{Si}}_3$${\mathrm{N}}_4$ and hypothetical β-${\mathrm{C}}_3$${\mathrm{N}}_4$
  Physical Review B, 1990
• Prediction of New Low Compressibility Solids
  Science, 1989
• Interactions of low energy reactive ions with surfaces. IV. Chemically bonded diamond-like films from ion-beam deposition
  The Journal of Chemical Physics, 1988
• Chemically bonded diamondlike carbon films from ion-beam deposition
  Physical Review Letters, 1987
• Formation and bonding structure of silicon nitride by 20-keV N+ ion implantation
  Journal of Applied Physics, 1985