Gratings for Integrated Optics by Electron Lithography
- 1 July 1974
- journal article
- Published by Optica Publishing Group in Applied Optics
- Vol. 13 (7) , 1695-1702
- https://doi.org/10.1364/ao.13.001695
Abstract
Optics InfoBase is the Optical Society's online library for flagship journals, partnered and copublished journals, and recent proceedings from OSA conferences.Keywords
This publication has 13 references indexed in Scilit:
- Gratings for integrated optics fabricated by electron microscopeApplied Physics Letters, 1973
- Fundamental aspects of electron beam lithography. I. Depth-dose response of polymeric electron beam resistsJournal of Applied Physics, 1973
- A Simple Flying Spot Scanner Design for Electron LithographyReview of Scientific Instruments, 1973
- Optical technique for producing 0.1-μ periodic surface structuresApplied Physics Letters, 1973
- A high efficiency thin grating coupler for integrated opticsOptics Communications, 1973
- Electron-Resist Fabrication of Bends and Couplers for Integrated Optical CircuitsApplied Optics, 1973
- Ion Beam Micromachining of Integrated Optics ComponentsApplied Optics, 1973
- Organosilicon Films Formed by an RF Plasma Polymerization ProcessJournal of the Electrochemical Society, 1972
- Holographic Thin Film CouplersBell System Technical Journal, 1970
- GRATING COUPLER FOR EFFICIENT EXCITATION OF OPTICAL GUIDED WAVES IN THIN FILMSApplied Physics Letters, 1970