Abstract
CV analysis applied to a depletion layer bordering a semiconducting channel does not provide the true impurity distribution if the space−charge region penetrates to another depletion layer at the other side of the channel, i.e., if the channel is partially depleted. Cases in point are an epitaxial semiconducting channel on a semi−insulating chromium−doped gallium arsenide substrate; an n−channel on a p−substrate; and a heterojunction of a semiconducting epitaxial layer on an insulating substrate with interface states causing depletion.