Present status of automatic ellipsometers
- 1 June 1976
- journal article
- Published by Elsevier in Surface Science
- Vol. 56, 19-36
- https://doi.org/10.1016/0039-6028(76)90431-3
Abstract
No abstract availableKeywords
This publication has 45 references indexed in Scilit:
- Analysis of systematic errors in rotating-analyzer ellipsometers*Journal of the Optical Society of America, 1974
- A differential ellipsometerReview of Scientific Instruments, 1974
- Performance Tests for Automatic EllipsometersApplied Optics, 1974
- Choice of modulation depth for automatic polarimeters and ellipsometersJournal of the Optical Society of America, 1973
- Use of a Stable Polarization Modulator in a Scanning Spectrophotometer and EllipsometerReview of Scientific Instruments, 1973
- Modified Jones calculus for the analysis of errors in polarization-modulation ellipsometry*Journal of the Optical Society of America, 1973
- Optical Measurements on Liquid Metals Using a New EllipsometerJournal of the Optical Society of America, 1968
- A Computer-Operated Following EllipsometerApplied Optics, 1967
- A Mechanical Modulator for Use with Precision EllipsometersApplied Optics, 1967
- Automatic Ellipsometer Automatic Polarimetry by Means of an ADP Polarization Modulator IIIApplied Optics, 1966