GaAs/GaAlAs graded refractive-index embedded core optical waveguides by OMCVD
- 1 April 1989
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Photonics Technology Letters
- Vol. 1 (4) , 80-82
- https://doi.org/10.1109/68.87909
Abstract
A description is given of graded refractive-index embedded core optical (GRECO) waveguides produced in GaAs/GaAlAs by sequential introduction of varying numbers of superlattice periods during metallorganic chemical vapor deposition (MOVCD) growth of the GaAs core material on patterned substrates. This technique offers the possibility of synthesizing the vertical index profile of the core and provides a built-in index difference for lateral confinement of guided modes. Fully planarized embedded waveguides fabricated with propagation losses of 1.5 dB/cm at a wavelength of 1.523 mu m are reported; their field distribution was analyzed using a finite-element technique.Keywords
This publication has 6 references indexed in Scilit:
- Molecular beam epitaxy of GaAs/AlGaAs superlattice heterostructures on nonplanar substratesApplied Physics Letters, 1987
- A study of the orientation dependence of Ga(Al)As growth by MOVPEJournal of Crystal Growth, 1986
- Simple and accurate loss measurement technique for semiconductor optical waveguidesElectronics Letters, 1985
- Finite Element Analysis Waveguides of OpticalIEEE Transactions on Microwave Theory and Techniques, 1981
- Self-aligned three-dimensional Ga1−xAlxAs structures grown by molecular beam epitaxyApplied Physics Letters, 1977
- Growth of GaAs-Ga1−xAlxAs over preferentially etched channels by molecular beam epitaxy: A technique for two-dimensional thin-film definitionApplied Physics Letters, 1977