Integrated magnetic microrelays: normally open, normally closed, and multi-pole devices
- 22 November 2002
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- Vol. 2, 1149-1152
- https://doi.org/10.1109/sensor.1997.635408
Abstract
A fully integrated magnetically actuated micromachined relay has been realized. This particular device uses a single layer coil to actuate a movable upper magnetically responsive platform. The minimum current for actuation was 180 mA, resulting in an actuation power of 33 mW. Devices have been tested which can make and break 1.2 A of current through the relay contacts when the relay is electromagnetically switched. Operational lifetimes in excess of 300,000 operations have been observed. A normally closed relay has also been developed through the addition of permanent magnets to the microrelay. These devices have also been able to electromagnetically switch 1.2 A of current. Multi-pole devices, which contain more than one pair of contacts per coil have also been realized, and possess comparable performance characteristics to single-pole devices.Keywords
This publication has 10 references indexed in Scilit:
- A Surface Micromachined Miniature Switch For Telecommunications Applications With Signal Frequencies From DC Up To 4 GhzPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2005
- An Electrostatfcally Actuated Micro-relayPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2005
- A micromechanical relay with a thermally-driven mercury micro-dropPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Thermally controlled magnetization actuator (TCMA) using thermosensitive magnetic materialsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Electrostatic polysilicon microrelays integrated with MOSFETsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Fully integrated magnetically actuated micromachined relaysJournal of Microelectromechanical Systems, 1998
- Integrated circuit compatible electrostatic polysilicon microrelaysJournal of Micromechanics and Microengineering, 1995
- Development of micromachined devices using polyimide-based processesSensors and Actuators A: Physical, 1994
- Electromagnetic microrelays: Concepts and fundamental characteristicsSensors and Actuators A: Physical, 1994
- Micromechanical Membrane Switches on SiliconIBM Journal of Research and Development, 1979