Hydrogenation of Reactively Sputtered AINxOy Films
- 16 January 1990
- journal article
- research article
- Published by Wiley in Physica Status Solidi (a)
- Vol. 117 (1) , K23-K27
- https://doi.org/10.1002/pssa.2211170142
Abstract
No abstract availableThis publication has 6 references indexed in Scilit:
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- Electronic structure of hydrogenated and unhydrogenated amorphous: A photoemission studyPhysical Review B, 1984
- Effect of Hydrogen Gas on c-Axis Oriented AlN Films Prepared by Reactive Magnetron SputteringJapanese Journal of Applied Physics, 1981
- Determination of the Refractive Index of Thin Dielectric Films*Journal of the Optical Society of America, 1964