Ion implantation in amorphous germanium and silicon
- 1 June 1978
- journal article
- Published by Elsevier in Solid State Communications
- Vol. 26 (12) , 933-936
- https://doi.org/10.1016/0038-1098(78)91255-3
Abstract
No abstract availableKeywords
This publication has 10 references indexed in Scilit:
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