Synthesis of thin films of semiconductor and refractory metal nitrides by laser irradiation of solid samples in ambient gases
- 1 October 1992
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 218 (1-2) , 219-230
- https://doi.org/10.1016/0040-6090(92)90922-x
Abstract
No abstract availableKeywords
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