Bandgap Engineering in Hydrogenated Silicon Films Made by Combined Hydrogen Dilution and Atomic Hydrogen Treatments
- 1 January 1993
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- Nuclear magnetic resonance study on Si-H microstructure in hydrogenated amorphous silicon prepared by diluted-hydrogen and hydrogen-atom-treatment methodsApplied Physics Letters, 1992
- Growth of Ionic Crystals from Concentrated Aqueous Solutions-Hypothesis of Cation Dehydration and Insertion to Growing InterfacesJapanese Journal of Applied Physics, 1991
- Formation kinetics and control of microcrystallite in μc-Si:H from glow discharge plasmaJournal of Non-Crystalline Solids, 1983
- ELECTRONIC PROPERTIES OF MICROCRYSTALLINE SILICON FILMS PREPARED IN A GLOW DISCHARGE PLASMALe Journal de Physique Colloques, 1981
- Low-temperature crystallization of doped a-Si:H alloysApplied Physics Letters, 1980