Nuclear magnetic resonance study on Si-H microstructure in hydrogenated amorphous silicon prepared by diluted-hydrogen and hydrogen-atom-treatment methods

Publisher Website
Google Scholar
Abstract
[[abstract]]Silicon-hydrogen microstructures of hydrogenated amorphous silicon associated with hydrogen incorporation are reported, using various fabrication methods. The methods include, and gloe discharge using atomic hydrogen chemical annealing. Fourier transform infrared spectroscopy, and Fourier transform nuclear magnetic resonance, were used for analysis of silicon-hydrogen bonding configurations. Results for diluted hydrogen samples show a sharp line shape, suggesting that Si-H network of high temperature diluted hydrogen samples is getting closer to that of μc-Si:H or rf power sample in hydrogen microstructure.[[department]]電機工程學