Structures and stresses in Nanograin thin metal films
- 1 September 1989
- journal article
- Published by Elsevier in Materials Science and Engineering: A
- Vol. 117, 3-9
- https://doi.org/10.1016/0921-5093(89)90080-4
Abstract
No abstract availableKeywords
This publication has 14 references indexed in Scilit:
- Stresses and deformation processes in thin films on substratesCritical Reviews in Solid State and Materials Sciences, 1988
- Microstructure and growth kinetics of CrSi2 on Si{100} studied using cross-sectional transmission electron microscopyThin Solid Films, 1985
- Defect formation in amorphous structures as revealed by computer simulationThin Solid Films, 1984
- Internal stress and structure of evaporated chromium and MgF2 films and their dependence on substrate temperatureThin Solid Films, 1984
- Mechanical properties of optical filmsThin Solid Films, 1982
- Advances in Transmission Electron Microscope Techniques Applied to Device Failure AnalysisJournal of the Electrochemical Society, 1980
- Structure and internal stress in ultra-thin silver films deposited on MgF2 and SiO substratesThin Solid Films, 1978
- The origins of stress in thin nickel filmsThin Solid Films, 1972
- Internal StressesJournal of Vacuum Science and Technology, 1969
- Intrinsic Stress in Evaporated Metal FilmsJournal of the Electrochemical Society, 1968