Metal film deposition by gas-phase laser pyrolysis of nickel tetracarbonyl
- 1 August 1985
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 58 (3) , 1400-1401
- https://doi.org/10.1063/1.336114
Abstract
A new technique for the deposition of nickel metal films by gas-phase pyrolysis of nickel tetracarbonyl gas is described. A pulsed CO2 laser is used to form a reaction zone adjacent to a cold substrate, resulting in a rapidly quenched film. The technique relies on dielectric breakdown of a mixture of source and carrier gases and therefore lends itself to a variety of source gases and chemistries. Adherence data and compositional and structural analyses are presented.This publication has 7 references indexed in Scilit:
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