Über die Bestimmung des Konzentrationsprofiles von Diffusionsschichten in Silizium aus Schichtleitfähigkeitsmessungen
- 1 January 1961
- journal article
- research article
- Published by Wiley in Physica Status Solidi (b)
- Vol. 1 (2) , 181-188
- https://doi.org/10.1002/pssb.19610010209
Abstract
No abstract availableKeywords
This publication has 8 references indexed in Scilit:
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- Surface Protection and Selective Masking during Diffusion in SiliconJournal of the Electrochemical Society, 1957
- Diffusion of Donor and Acceptor Elements in SiliconJournal of Applied Physics, 1956
- Ber cksichtigung der systematischen Fehler bei den Fehlerangaben von Me gr enThe Science of Nature, 1956