Coplanar waveguides on silicon substrate with thick oxidized porous silicon (OPS) layer

This publication has 10 references indexed in Scilit:

• Selective oxidized porous silicon (SOPS) substrate for microwave power chip-packaging
  Published by Institute of Electrical and Electronics Engineers (IEEE) ,2002
• Temperature dependent performance of coplanar waveguide (CPW) on substrates of various materials
  Published by Institute of Electrical and Electronics Engineers (IEEE) ,2002
• Monolithic planar RF inductor and waveguide structures on silicon with performance comparable to those in GaAs MMIC
  Published by Institute of Electrical and Electronics Engineers (IEEE) ,2002
• Self-aligned oxidised porous silicon optical waveguideswith reduced loss
  Electronics Letters, 2000
• High-performance planar inductor on thick oxidized porous silicon (OPS) substrate
  IEEE Microwave and Guided Wave Letters, 1997
• Effects of losses on signals in PWB's
  IEEE Transactions on Components, Packaging, and Manufacturing Technology: Part B, 1994
• Fast, accurate and simple approximate analytic formulas for calculating the parameters of supported coplanar waveguides for (M)MIC's
  IEEE Transactions on Microwave Theory and Techniques, 1992
• Microwave performance of SOI n-MOSFETs and coplanar waveguides
  IEEE Electron Device Letters, 1991
• Full isolation technology by porous oxidized silicon and its application to LSIs
  Published by Institute of Electrical and Electronics Engineers (IEEE) ,1981
• Formation and Properties of Porous Silicon and Its Application
  Journal of the Electrochemical Society, 1975