Superconducting Bi-Sr-Ca-Cu-O films by magnetron sputtering of single Bi2O3-SrF2-CaF2-CuO targets

Abstract
Superconducting Bi‐Sr‐Ca‐Cu‐O films have been fabricated by rf magnetron sputtering using single mixed Bi2O3‐SrF2‐CaF2‐CuO targets. Uniform, reproducible films were formed on SrTiO3 substrates with zero resistance as high as 78 K. Grain morphology and orientation were affected by annealing temperature and the F content of the films. The final films showed excellent environmental and mechanical stability.