Electrical characterization of rapid thermal annealed radio frequency sputtered silicon oxide films
- 15 November 1996
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 80 (10) , 5837-5842
- https://doi.org/10.1063/1.363576
Abstract
No abstract availableThis publication has 15 references indexed in Scilit:
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