Unique Method of Patterning Superconducting Thin Films by Selective Growth of Y–Ba–Cu–O
- 1 June 1990
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 29 (6R) , 1076-1079
- https://doi.org/10.1143/jjap.29.1076
Abstract
A new method of patterning superconducting thin films by the selective growth of YBaCuO has been developed. Films deposited on MgO substrates are superconductive, while films on SiO2 films have the insulative properties. The results of X-ray diffraction and Auger electron spectroscopy analyses show that the insulative properties are due to the intermixing of YBaCuO films and SiO2 films. A superconducting line of 15 µm wide has the transition temperature of zero resistance at 72 K and the critical current density of 3.26×106 A/cm2 at 4.2 K.Keywords
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