The influence of Cl2 on Si1 - xGex selective epitaxial growth and B-doping properties by UHV-CVD
- 2 February 1993
- journal article
- Published by Elsevier in Journal of Crystal Growth
- Vol. 127 (1-4) , 484-488
- https://doi.org/10.1016/0022-0248(93)90666-k
Abstract
No abstract availableKeywords
This publication has 8 references indexed in Scilit:
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