Phase step measurement and variable step algorithms in phase-shifting interferometry

Publisher Website
Google Scholar
Abstract
A novel method, utilizing Lissajous figures and ellipse fitting, of calculating the phase difference between interferograms obtained from a phase shifting interferometer is described. Intensity bias and intensity modulation of interferograms are also calculated using this technique. Two new phase extraction algorithms are presented which use intensity and phase step information to calculate a surface from interferograms acquired with uneven phase steps. One algorithm allows surface phase to be calculated from two interferograms. Preliminary results from the Lissajous figure technique and the presented algorithms are discussed.