Low temperature tempering-induced changes in bulk resistivity, temperature coefficient of resistivity and stress in physically vapor-deposited TiN
- 1 December 1988
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 36 (3-4) , 605-616
- https://doi.org/10.1016/0257-8972(88)90003-5
Abstract
No abstract availableKeywords
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