TED of boron in the presence of EOR defects: the use of the theory of Ostwald ripening to calculate Si-interstitial supersaturation in the vicinity of extrinsic defects
- 1 May 1996
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 112 (1-4) , 129-132
- https://doi.org/10.1016/0168-583x(95)01017-3
Abstract
No abstract availableThis publication has 12 references indexed in Scilit:
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