Observation and simulation of focused ion beam induced damage
- 1 September 1994
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 93 (4) , 439-446
- https://doi.org/10.1016/0168-583x(94)95632-4
Abstract
No abstract availableThis publication has 21 references indexed in Scilit:
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