Preparation of epitaxial layers of silicon I. Direct and indirect processes
- 1 November 1964
- journal article
- Published by Elsevier in Microelectronics Reliability
- Vol. 3 (3) , 165-170
- https://doi.org/10.1016/0026-2714(64)90087-3
Abstract
No abstract availableThis publication has 6 references indexed in Scilit:
- Epitaxial deposition of silicon on quartzSolid State Communications, 1963
- Vacuum evaporated silicon layers free from stacking faultsPhilosophical Magazine, 1963
- Epitaxial Growth of Silicon from the Pyrolysis of Monosilane on Silicon SubstratesJournal of the Electrochemical Society, 1963
- Epitaxial Growth of Silicon by Vacuum EvaporationNature, 1962
- Epitaxial Growth of Silicon by Hydrogen Reduction of SiHCl[sub 3] onto Silicon SubstratesJournal of the Electrochemical Society, 1962
- Epitaxial Silicon Films by the Hydrogen Reduction of SiCl[sub 4]Journal of the Electrochemical Society, 1961