Realization of numerical aperture 2.0 using a gallium phosphide solid immersion lens
- 27 December 1999
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 75 (26) , 4064-4066
- https://doi.org/10.1063/1.125537
Abstract
We report a study of a gallium phosphide, hemispherical, solid immersion lens through the imaging of 40-nm-diam fluorescent dye balls. A spatial resolution as small as 139 nm has been achieved at a wavelength of 560 nm, which is equivalent to a diffraction-limited system of numerical aperture 2.0. This resolution is a 33% improvement over conventional oil immersion objectives and previously reported solid immersion lenses, which typically have a numerical aperture around 1.5.Keywords
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