Effect of low-energy hydrogen ion implantation on dendritic web silicon solar cells

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Abstract
The effect of a low‐energy (0.4 keV), short‐time (2 min), heavy‐dose (1018/cm2) hydrogen ion implant on dendritic web silicon solar cells and material was investigated. Such an implant was observed to improve the cell open‐circuit voltage and short‐circuit current appreciably for a number of cells. In spite of the low implant energy, measurements of internal quantum efficiency indicate that it is the base of the cell, rather than the emitter, which benefits from the hydrogen implant. This is supported by the observation that the measured minority‐carrier diffusion length in the base did not change when the emitter was removed. In some cases, a threefold increase of the base diffusion length was observed after implantation. The effects of the hydrogen implantation were not changed by a thermal stress test at 250 °C for 111 h in nitrogen. It is speculated that hydrogen enters the bulk by traveling along dislocations, as proposed recently for edge‐defined film‐fed growth silicon ribbon.