Study of GaN thin layers subjected to high-temperature rapid thermal annealing
- 1 October 1998
- journal article
- Published by Pleiades Publishing Ltd in Semiconductors
- Vol. 32 (10) , 1048-1053
- https://doi.org/10.1134/1.1187579
Abstract
A detailed study of the effect of rapid thermal annealing in a N2 or Ar atmosphere on the properties of thin GaN layers grown by molecular-beam epitaxy on sapphire substrates was performed. After rapid thermal annealing, an enhancement of the crystal quality of such films was observed. Low-temperature photoluminescence measurements revealed a substantial increase in impurity recombination near the fundamental absorption edge after a rapid high-temperature anneal in a nitrogen atmosphere. A significant decrease in the impurity photoluminescence of the GaN films with protective SiO2 coatings was observed following the anneals.Keywords
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