Sensitive Detection of Hydrogen in a-Si: H by Coincidence Measurement of Elastically Scattered 100 MeV 3He2+ Ions and Recoil Protons

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Abstract
We have drastically improved the sensitivity of the nuclear elastic scattering (NES) method for determining hydrogen concentrations in hydrogenated amorphous silicon (a-Si: H) films. A beam of 100 MeV 3He2+ ions was used in the experiment. By taking the coincidence of detection of the scattered 3He ion with that of the recoil proton, we could achieve a sensitivity of 0.1 atomic percent with a precision of about 1 percent for 1 µm films.