Kinetic aspects of the growth of platelets and voids in H implanted Si
- 1 May 2001
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 178 (1-4) , 160-164
- https://doi.org/10.1016/s0168-583x(00)00503-6
Abstract
No abstract availableThis publication has 9 references indexed in Scilit:
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