SOI by CVD: Epitaxial Lateral Overgrowth (ELO) process—Review
- 2 October 1983
- journal article
- Published by Elsevier in Journal of Crystal Growth
- Vol. 63 (3) , 493-526
- https://doi.org/10.1016/0022-0248(83)90164-1
Abstract
No abstract availableKeywords
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