Electron collision cross sections for the monosilane molecule
- 14 January 1989
- journal article
- Published by IOP Publishing in Journal of Physics D: Applied Physics
- Vol. 22 (1) , 107-112
- https://doi.org/10.1088/0022-3727/22/1/015
Abstract
In monosilane-argon mixtures the measured electron swarm parameters, the drift velocity and the longitudinal diffusion coefficient showed distinctive features: humps in the drift velocity and dents in the ratio of the longitudinal diffusion coefficient to the electron mobility. These swarm parameters were analysed using a Boltzmann analysis and these features in the swarm parameters were conveniently used to derive a reasonable energy dependence of the vibrational excitation cross sections of a monosilane molecule. The derived cross sections were also confirmed to be consistent with published electron swarm parameters in pure monosilane gas.Keywords
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