Transmission Electron Microscopy Study on Microstructure of Tungsten/Carbon Multilayer Films
- 1 October 1989
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 28 (10R)
- https://doi.org/10.1143/jjap.28.1909
Abstract
Microstructure changes of tungsten/carbon (W/C) multilayer films with heat treatments were investigated by high-resolution transmission electron microscopy (HRTEM) and X-ray diffraction. When the W/C amorphous multilayer films were annealed in vacuum at 800 or 900°C, the X-ray reflectivity became 30% higher than that of as-prepared ones in association with a slight increase of the periodic spacing of the multilayers. HRTEM images of the annealed specimens revealed the existence of randomly distributed microcrystallites of W 2 C in the W layers. The increase of X-ray reflectivity was interpreted well with a simple structural model assuming the decrease of the C-atom-number density in the C layers.Keywords
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