Effects of substrate temperature on TiN films deposited by ion plating using spatial magnetic field
- 1 January 1995
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 254 (1-2) , 16-22
- https://doi.org/10.1016/0040-6090(94)06271-l
Abstract
No abstract availableKeywords
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