Temperature dependence of the electrical resistivity of reactively sputtered TiN films
- 1 May 1993
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 73 (9) , 4462-4467
- https://doi.org/10.1063/1.352785
Abstract
No abstract availableThis publication has 28 references indexed in Scilit:
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