Influence of the deposition parameters on the composition, structure and X-ray photoelectron spectroscopy spectra of TiN films
- 1 July 1992
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 215 (1) , 1-7
- https://doi.org/10.1016/0040-6090(92)90692-5
Abstract
No abstract availableKeywords
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