Generalized formula for curvature radius and layer stresses caused by thermal strain in semiconductor multilayer structures
- 1 January 1983
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 54 (1) , 83-85
- https://doi.org/10.1063/1.331690
Abstract
The generalized formulas have been derived for the curvature radius and layer stresses caused by thermal strain in semiconductor multilayer structure with different elastic moduli and growth temperatures. Several special forms and applications are given.This publication has 7 references indexed in Scilit:
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