Effect of substrates on epitaxial PZT films by a coating photolysis process
- 30 June 2002
- journal article
- Published by Elsevier in Materials Science in Semiconductor Processing
- Vol. 5 (2-3) , 207-210
- https://doi.org/10.1016/s1369-8001(02)00074-4
Abstract
No abstract availableKeywords
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