Regression calibration method for rotating element ellipsometers
- 1 October 1993
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 234 (1-2) , 395-398
- https://doi.org/10.1016/0040-6090(93)90293-x
Abstract
No abstract availableThis publication has 6 references indexed in Scilit:
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- Design and operation of an automated, high-temperature ellipsometerJournal of the Optical Society of America, 1974