An experimental study of the influence of oxygen on silicide formation with tungsten deposited from tungsten hexafluoride
- 1 January 1991
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 69 (1) , 213-219
- https://doi.org/10.1063/1.347753
Abstract
No abstract availableThis publication has 17 references indexed in Scilit:
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