Chemical Vapor Deposition of Gold
- 1 January 1986
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 8 references indexed in Scilit:
- Chemical Vapor Deposition of GoldJournal of the Electrochemical Society, 1987
- Laser chemical vapor deposition of gold: Part IIJournal of Vacuum Science & Technology B, 1986
- Ru and Os film deposition from metal carbonylsJournal of Vacuum Science & Technology A, 1986
- Resistivity, grain size, and impurity effects in chemically vapor-deposited tungsten filmsJournal of Applied Physics, 1985
- Laser chemical vapor deposition of goldApplied Physics Letters, 1985
- Selective Low Pressure Chemical Vapor Deposition of TungstenJournal of the Electrochemical Society, 1984
- Aluminum films prepared by metal-organic low pressure chemical vapor depositionThin Solid Films, 1984
- Metallization in microelectronicsThin Solid Films, 1977