High‐Throughput and Etch‐Selective Nanoimprinting and Stamping Based on Fast‐ Thermal‐Curing Poly(dimethylsiloxane)s
- 13 April 2007
- journal article
- research article
- Published by Wiley in Advanced Materials
- Vol. 19 (9) , 1222-1227
- https://doi.org/10.1002/adma.200601905
Abstract
No abstract availableKeywords
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