Infrared spectroscopic techniques for quantitative characterization of dielectric thin films on silicon wafers
- 30 September 1994
- journal article
- review article
- Published by Elsevier in Spectrochimica Acta Part A: Molecular Spectroscopy
- Vol. 50 (10) , 1687-1723
- https://doi.org/10.1016/0584-8539(94)80177-0
Abstract
No abstract availableThis publication has 86 references indexed in Scilit:
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