Extension of the Stoney formula for film–substrate systems with gradient stress for MEMS applications
- 13 January 2006
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 16 (2) , 382-389
- https://doi.org/10.1088/0960-1317/16/2/024
Abstract
No abstract availableThis publication has 33 references indexed in Scilit:
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