Immersion Deposition of Metal Films on Silicon and Germanium Substrates in Supercritical Carbon Dioxide
- 16 November 2002
- journal article
- Published by American Chemical Society (ACS) in Chemistry of Materials
- Vol. 15 (1) , 83-91
- https://doi.org/10.1021/cm011534h
Abstract
No abstract availableThis publication has 59 references indexed in Scilit:
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